JPH0261966U - - Google Patents
Info
- Publication number
- JPH0261966U JPH0261966U JP13970688U JP13970688U JPH0261966U JP H0261966 U JPH0261966 U JP H0261966U JP 13970688 U JP13970688 U JP 13970688U JP 13970688 U JP13970688 U JP 13970688U JP H0261966 U JPH0261966 U JP H0261966U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- reaction tube
- hydride
- source metal
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 150000004678 hydrides Chemical class 0.000 claims 2
- 239000000376 reactant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13970688U JPH0261966U (en]) | 1988-10-26 | 1988-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13970688U JPH0261966U (en]) | 1988-10-26 | 1988-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261966U true JPH0261966U (en]) | 1990-05-09 |
Family
ID=31403215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13970688U Pending JPH0261966U (en]) | 1988-10-26 | 1988-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261966U (en]) |
-
1988
- 1988-10-26 JP JP13970688U patent/JPH0261966U/ja active Pending